Title:
VAPOR DEPOSITION DEVICE CAPABLE OF ROTATING AND LIFTING IN RECIPROCATING MANNER
Document Type and Number:
WIPO Patent Application WO/2023/082855
Kind Code:
A1
Abstract:
A vapor deposition device capable of rotating and lifting in a reciprocating manner comprises a vapor deposition cavity, a base table, a base shaft, a telescopic assembly, a passive lifting and rotating component, a rotating mechanism and a lifting mechanism, wherein the rotating mechanism is fixedly connected to the telescopic assembly so as to drive the telescopic assembly to rotate in a reciprocating manner, and thus sequentially drive the base table, the base shaft and the passive lifting and rotating component to rotate in a reciprocating manner; the lifting mechanism is rotationally slidably connected to the passive lifting and rotating component so as to drive the passive lifting and rotating component to perform lifting and thus drive the base shaft and the base table to perform lifting; and the telescopic assembly extends as the base table ascends, and retracts as the the base table descends. According to the apparatus, the cooperation of lifting and rotation of a wafer base is met and the lifting and rotation do not interfere with each other, winding damage of electrical wires can be prevented by means of reciprocating rotation, the device can reach an absolute physical ultra-high vacuum state, and the influences of a strong magnetic field on the deposition environment inside the cavity and an external environment can be prevented.
Inventors:
SUNG WALEY WEITSUNG (CN)
XIE WENJUN (CN)
XIE WENJUN (CN)
Application Number:
PCT/CN2022/120468
Publication Date:
May 19, 2023
Filing Date:
September 22, 2022
Export Citation:
Assignee:
BETONE TECH SHANGHAI INC (CN)
International Classes:
C23C14/50; C23C14/56; C23C16/44; C23C16/458
Domestic Patent References:
| WO2015188353A1 | 2015-12-17 |
Foreign References:
| CN113774352A | 2021-12-10 | |||
| CN113774360A | 2021-12-10 | |||
| CN111364026A | 2020-07-03 | |||
| CN111455341A | 2020-07-28 | |||
| CN204325498U | 2015-05-13 |
Attorney, Agent or Firm:
J.Z.M.C. PATENT AND TRADEMARK LAW OFFICE (GENERAL PARTNERSHIP) (CN)
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