Title:
VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND METHOD FOR MANUFACTURING ORGANIC EL DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/185860
Kind Code:
A1
Abstract:
A vapor deposition device according to an embodiment of the present invention has a structure in which a vapor deposition mask is chucked by an electromagnet (3), and includes a control circuit (7) for gradually varying a magnetic field generated by the electromagnet (3) when applying an electric current to the electromagnet (3), the control circuit (7) being connected between the electromagnet (3) and a power source circuit (6) for driving the electromagnet (3). As a result, the variation in electric current flowing to an electromagnetic coil (32) of the electromagnet (3) is gradual, effects due to electromagnetic induction are suppressed, and defects in elements or the like formed on a vapor-deposited substrate or degradation of element characteristics is suppressed.
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| JPH05260773 | ELECTROSTATIC CHUCKING APPARATUS |
Inventors:
KISHIMOTO KATSUHIKO (JP)
NISHIDA KOSHI (JP)
NISHIDA KOSHI (JP)
Application Number:
PCT/JP2017/014150
Publication Date:
October 11, 2018
Filing Date:
April 04, 2017
Export Citation:
Assignee:
SAKAI DISPLAY PRODUCTS CORP (JP)
International Classes:
B23Q3/15; C23C14/34; H01L51/50
Domestic Patent References:
| WO2011114829A1 | 2011-09-22 |
Foreign References:
| JP2010209459A | 2010-09-24 | |||
| JP2005515080A | 2005-05-26 | |||
| JPS54148270A | 1979-11-20 |
Attorney, Agent or Firm:
ASAHINA & CO. (JP)
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