Title:
VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND ORGANIC ELECTROLUMINESCENCE ELEMENT MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2015/083600
Kind Code:
A1
Abstract:
The present invention provides a vapor deposition device that can lessen the impact of contamination, a vapor deposition method, and an organic electroluminescence element manufacturing method. The present invention is a vapor deposition device for forming a film on a substrate, wherein the following are provided: a vapor deposition chamber; a vapor deposition unit that includes a vapor deposition mask having openings for pattern formation; and a conveyance mechanism that can move, in a first direction perpendicular to the normal direction of the vapor deposition mask, either the substrate or the vapor deposition unit relative to the other, and that can temporarily stop, at a stop position, the substrate with respect to the vapor deposition unit. When the substrate is in the stop position, a subject-to-deposition region on the substrate does not overlap with the openings of the deposition mask. The vapor deposition chamber includes a first exhaust port and a second exhaust port. When the substrate is in the stop position, and when viewed along a second direction perpendicular to the normal direction and the first direction, at least a portion of the second exhaust port is positioned below the substrate.
Inventors:
KOBAYASHI YUHKI
KIKUCHI KATSUHIRO
KAWATO SHINICHI
OCHI TAKASHI
INOUE SATOSHI
MATSUNAGA KAZUKI
MATSUMOTO EIICHI (JP)
ICHIHARA MASAHIRO (JP)
KIKUCHI KATSUHIRO
KAWATO SHINICHI
OCHI TAKASHI
INOUE SATOSHI
MATSUNAGA KAZUKI
MATSUMOTO EIICHI (JP)
ICHIHARA MASAHIRO (JP)
Application Number:
PCT/JP2014/081339
Publication Date:
June 11, 2015
Filing Date:
November 27, 2014
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
C23C14/54; C23C14/04; H01L51/50; H05B33/10
Foreign References:
| JP2013159841A | 2013-08-19 | |||
| JP2012233214A | 2012-11-29 | |||
| JP2014019942A | 2014-02-03 | |||
| JP2002234103A | 2002-08-20 |
Attorney, Agent or Firm:
YASUTOMI & Associates (JP)
Patent business corporation Yasutomi international patent firm (JP)
Patent business corporation Yasutomi international patent firm (JP)
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