Title:
VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENCE DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/053402
Kind Code:
A1
Abstract:
A vapor deposition device (50) has partitioning walls (26) vertically arranged within a film-forming region on a substrate (200) to be formed with a film. The vapor deposition device (50) is provided with: a mask unit (80) equipped with a vapor deposition source (85) and a shadow mask (81), the relative positions of which are fixed; a coupling means for coupling the substrate (200) to be formed with a film and the shadow mask (81) via the partitioning walls (26); and a moving means for relatively moving the mask unit (80) and/or the substrate (200) to be formed with a film while maintaining the coupled state created by means of the coupling means.
Inventors:
SONODA TOHRU
KAWATO SHINICHI
INOUE SATOSHI
KAWATO SHINICHI
INOUE SATOSHI
Application Number:
PCT/JP2011/073426
Publication Date:
April 26, 2012
Filing Date:
October 12, 2011
Export Citation:
Assignee:
SHARP KK (JP)
SONODA TOHRU
KAWATO SHINICHI
INOUE SATOSHI
SONODA TOHRU
KAWATO SHINICHI
INOUE SATOSHI
International Classes:
C23C14/24; H01L51/50; H05B33/10; H05B33/12; H05B33/22
Foreign References:
| JP2006028583A | 2006-02-02 | |||
| JP2010116591A | 2010-05-27 | |||
| JP2004103341A | 2004-04-02 | |||
| JP2009277510A | 2009-11-26 | |||
| JP2000188179A | 2000-07-04 | |||
| JP2007141821A | 2007-06-07 | |||
| JPH08227276A | 1996-09-03 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
Patent business corporation Hara [Kenzo] international patent firm (JP)
Patent business corporation Hara [Kenzo] international patent firm (JP)
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