Title:
VAPOR-DEPOSITION DEVICE AND VAPOR-DEPOSITION METHOD
Document Type and Number:
WIPO Patent Application WO/2012/127993
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a vapor-deposition device and method whereby even a small vapor-deposition mask can be used to deposit a patterned film over a wide area by moving a substrate relative thereto at a separation therefrom. Said vapor-deposition device and method also prevent film-pattern overlap, minimize incident radiant heat from an evaporation source, and despite the configuration in which the substrate and vapor-deposition mask are moved relative to each other at a separation from each other, allow fast, precise vapor deposition. A mask holder (6) that has scatter-control parts provided with control openings (5) is provided between the evaporation source (1) and the substrate (4). The abovementioned vapor-deposition mask (2) is attached to said mask holder (6). While being kept at a distance from said vapor-deposition mask (2), the substrate (4) is made able to move freely relative to the evaporation source (1) and the mask holder (6) with the vapor-deposition mask (2) attached thereto. The openings (3) in the vapor-deposition mask (2) are slit-shaped, being long in the direction of the relative movement with respect to the substrate (1) and narrow in a width direction orthogonal to said relative movement. A plurality of said openings are provided in parallel in said width direction.
Inventors:
NARUMI HIROJI (JP)
TAMURA HIROYUKI (JP)
ICHIHARA MASAHIRO (JP)
MATSUMOTO EIICHI (JP)
TAJIMA MIYUKI (JP)
NAGATA HIROAKI (JP)
YOSHIOKA MASAKI (JP)
TAMURA HIROYUKI (JP)
ICHIHARA MASAHIRO (JP)
MATSUMOTO EIICHI (JP)
TAJIMA MIYUKI (JP)
NAGATA HIROAKI (JP)
YOSHIOKA MASAKI (JP)
Application Number:
PCT/JP2012/054724
Publication Date:
September 27, 2012
Filing Date:
February 27, 2012
Export Citation:
Assignee:
CANON TOKKI CORP (JP)
NARUMI HIROJI (JP)
TAMURA HIROYUKI (JP)
ICHIHARA MASAHIRO (JP)
MATSUMOTO EIICHI (JP)
TAJIMA MIYUKI (JP)
NAGATA HIROAKI (JP)
YOSHIOKA MASAKI (JP)
NARUMI HIROJI (JP)
TAMURA HIROYUKI (JP)
ICHIHARA MASAHIRO (JP)
MATSUMOTO EIICHI (JP)
TAJIMA MIYUKI (JP)
NAGATA HIROAKI (JP)
YOSHIOKA MASAKI (JP)
International Classes:
C23C14/24; C23C14/04; H01L51/50; H05B33/10
Foreign References:
| JP2011047035A | 2011-03-10 | |||
| JP2010270396A | 2010-12-02 | |||
| JP2004119064A | 2004-04-15 | |||
| JPH07286272A | 1995-10-31 |
Attorney, Agent or Firm:
YOSHII Takeshi et al. (JP)
Yoshii 剛 (JP)
Yoshii 剛 (JP)
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Claims: