Title:
VAPOR DEPOSITION DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2019/119907
Kind Code:
A1
Abstract:
A vapor deposition device, comprising a housing (10) which is provided with a concave cavity (11) having an upward opening; a wafer stage (20) disposed inside the concave cavity (11); a sealing assembly (30) for sealing the concave cavity (11), so that a vacuum cavity is formed by the sealing assembly and the concave cavity (11); a gas homogenizing assembly (40) disposed in the vacuum cavity, located above the wafer stage (20), and guiding gas out toward the wafer stage (20); and a gas inlet assembly (50) that penetrates through the sealing assembly (30) and comprises a cleaning gas path and a pulse gas path, the cleaning gas path being communicated with the gas homogenizing assembly, and the pulse gas path being directly communicated with the concave cavity (11). Also disclosed is a vapor deposition method.
Inventors:
HU DONGDONG (CN)
LI NA (CN)
CHEN LU (CN)
XU KAIDONG (CN)
HOU YONGGANG (CN)
WANG CHENGYI (CN)
CHE DONGCHEN (CN)
SUN WEI (CN)
LI NA (CN)
CHEN LU (CN)
XU KAIDONG (CN)
HOU YONGGANG (CN)
WANG CHENGYI (CN)
CHE DONGCHEN (CN)
SUN WEI (CN)
Application Number:
PCT/CN2018/106825
Publication Date:
June 27, 2019
Filing Date:
September 21, 2018
Export Citation:
Assignee:
JIANGSU LEUVEN INSTRUMMENTS CO LTD (CN)
International Classes:
C23C16/50; C23C16/455
Foreign References:
| CN108048820A | 2018-05-18 | |||
| US5906683A | 1999-05-25 | |||
| US6182602B1 | 2001-02-06 | |||
| CN102420120A | 2012-04-18 | |||
| CN103208440A | 2013-07-17 | |||
| CN205258600U | 2016-05-25 | |||
| CN205741208U | 2016-11-30 | |||
| CN206089801U | 2017-04-12 |
Attorney, Agent or Firm:
BEIJING TRUSTED INTELLECTUAL PROPERTY AGENCY LTD (CN)
Download PDF:
Previous Patent: FILTER ASSEMBLY AND PAN/TILT CAMERA
Next Patent: ANTIFOAM COMPOSITION FOR AQUEOUS WOOD PAINT
Next Patent: ANTIFOAM COMPOSITION FOR AQUEOUS WOOD PAINT