Title:
VAPOR DEPOSITION MASK, VAPOR DEPOSITION MASK DEVICE, VAPOR DEPOSITION MASK MANUFACTURING METHOD AND VAPOR DEPOSITION MASK DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/009050
Kind Code:
A1
Abstract:
A vapor deposition mask (20) comprises: a first mask (30) having an opening (35) formed therein; a second mask (40) that overlaps the first mask (30) and that has formed therein a plurality of through holes (45) having a planar dimension smaller than the planar dimension of the opening (35); and a plurality of bonding sections (16) for bonding the second mask (40) and the first mask (30) to each other. The plurality of bonding sections (16) are arranged along an outer edge (43) of the second mask (40), and a notch (46) is formed at a position corresponding to a space between two adjacent bonding sections (16) in the outer edge (43) of the second mask (40).
More Like This:
Inventors:
USHIKUSA MASATO (JP)
NAKAMURA YUSUKE (JP)
OKAMOTO HIDEYUKI (JP)
MURATA YOSHINORI (JP)
NAKAMURA YUSUKE (JP)
OKAMOTO HIDEYUKI (JP)
MURATA YOSHINORI (JP)
Application Number:
PCT/JP2018/023065
Publication Date:
January 10, 2019
Filing Date:
June 18, 2018
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD (JP)
International Classes:
C23C14/04; H01L51/50; H05B33/10
Domestic Patent References:
| WO2017057621A1 | 2017-04-06 | |||
| WO2015087936A1 | 2015-06-18 |
Foreign References:
| JPH0885869A | 1996-04-02 | |||
| JP2014529011A | 2014-10-30 | |||
| JP2005268822A | 2005-09-29 | |||
| JP2016148112A | 2016-08-18 | |||
| JP4606114B2 | 2011-01-05 | |||
| JP4562488B2 | 2010-10-13 |
Other References:
See also references of EP 3650575A4
Attorney, Agent or Firm:
NAGAI Hiroshi et al. (JP)
Download PDF: