Title:
VAPOR DEPOSITION MASK, METHOD FOR MANUFACTURING ORGANIC SEMICONDUCTOR ELEMENT, AND METHOD FOR MANUFACTURING ORGANIC EL DISPLAY
Document Type and Number:
WIPO Patent Application WO/2018/003766
Kind Code:
A1
Abstract:
Provided is a vapor deposition mask formed by layering a resin mask having a plurality of resin mask openings that correspond to a pattern that is to be fabricated by vapor deposition, and a metal mask having a metal mask opening, said masks being layered such that the resin mask openings and the metal mask opening overlap, wherein the shape of the metal mask opening, when the metal mask is viewed from above, is polygonal as a basic shape, and is also a shape to which has been added an extended portion that extends the length of the entire periphery of the polygon.
Inventors:
KAWASAKI HIROSHI (JP)
SONE YASUKO (JP)
HOKARI KUMIKO (JP)
SONE YASUKO (JP)
HOKARI KUMIKO (JP)
Application Number:
PCT/JP2017/023484
Publication Date:
January 04, 2018
Filing Date:
June 27, 2017
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD (JP)
International Classes:
C23C14/04; C23C16/04; H01L51/50; H05B33/10
Foreign References:
| JP2014208899A | 2014-11-06 | |||
| JP2014194062A | 2014-10-09 | |||
| JP2005163111A | 2005-06-23 | |||
| JP2004149868A | 2004-05-27 | |||
| JP2008208460A | 2008-09-11 |
Attorney, Agent or Firm:
INTECT INTERNATIONAL PATENT OFFICE et al. (JP)
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