Title:
VAPOR DEPOSITION MASK, VAPOR DEPOSITION METHOD, AND PRODUCTION METHOD FOR ORGANIC EL DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/130387
Kind Code:
A1
Abstract:
A vapor deposition mask that suppresses heat conduction at a frame thereof, that can be enlarged as a result of achieving weight reduction, and that makes it possible to perform high-precision vapor deposition at low cost. According to the embodiments, a frame (15) onto which a mask main body (10) is stuck is formed as a sandwich structure (150) in which a surface plate (152) is stuck to a surface that faces at least one portion of a core part (151).
Inventors:
KISHIMOTO KATSUHIKO (JP)
Application Number:
PCT/JP2017/046410
Publication Date:
July 04, 2019
Filing Date:
December 25, 2017
Export Citation:
Assignee:
SAKAI DISPLAY PRODUCTS CORP (JP)
International Classes:
C23C14/04; H01L51/50; H05B33/10
Foreign References:
| JP2006322015A | 2006-11-30 | |||
| JP2010524241A | 2010-07-15 | |||
| JP2017014582A | 2017-01-19 | |||
| JP2011516736A | 2011-05-26 |
Attorney, Agent or Firm:
ASAHINA & CO. (JP)
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