Title:
VAPOR DEPOSITION MATERIAL FOR THE PRODUCTION OF STRONTIUM /CALCIUM COMPOSITE OXIDE FILMS
Document Type and Number:
WIPO Patent Application WO/2010/008020
Kind Code:
A1
Abstract:
A vapor deposition material for the production of strontium/calcium composite oxide films, which consists of a polycrystalline material composed of strontium/calcium composite oxide grains having a general formula of Sr1-xCaxO (wherein x is 0.2 to 0.8) and an average grain diameter of 1.0 to 90μm and which has a mean pore diameter of 0.01 to 50μm. The vapor deposition material in itself is lowly adsorptive for water vapor or carbon dioxide gas or lowly reactive therewith, so that the vapor deposition material need not be surface-coated specially with a coating material.
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Inventors:
MASUDA AKIRA (JP)
TAKAZAKI KAORU (JP)
SAIDA MASATO (JP)
TAKAZAKI KAORU (JP)
SAIDA MASATO (JP)
Application Number:
PCT/JP2009/062809
Publication Date:
January 21, 2010
Filing Date:
July 15, 2009
Export Citation:
Assignee:
UBE MAT IND LTD (JP)
MASUDA AKIRA (JP)
TAKAZAKI KAORU (JP)
SAIDA MASATO (JP)
MASUDA AKIRA (JP)
TAKAZAKI KAORU (JP)
SAIDA MASATO (JP)
International Classes:
C01F11/06; C01B13/34; C23C14/24; C23C14/30; H01J9/02; H01J11/02
Foreign References:
| JP2002294432A | 2002-10-09 | |||
| JP2008091074A | 2008-04-17 |
Attorney, Agent or Firm:
YANAGAWA, YASUO (JP)
Yasuo Yanagawa (JP)
Yasuo Yanagawa (JP)
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