Title:
VAPOR-PHASE REACTOR
Document Type and Number:
WIPO Patent Application WO/2010/113299
Kind Code:
A1
Abstract:
Disclosed is a reactor which can achieve high reaction yield by preventing a counter-reaction or the like as far as possible, while maintaining high heat conduction efficiency. The reaction is particularly suitable for a high-temperature vapor-phase reaction of chlorosilane and hydrogen. The reactor comprises a reaction chamber wherein a plurality of kinds of raw material gases supplied from an inlet opening are reacted in a vapor phase and the thus-obtained reaction product gas is discharged from an outlet opening; a heating means which is attached to the reaction chamber for the purpose of heating the inside of the reaction chamber; and a reflection member which is so arranged inside the reaction chamber near the outlet opening as to direct the reaction product gas flow toward the outlet opening.
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Inventors:
MATSUO, Yasufumi (Oaza-oumi Itoigawa-sh, Niigata 93, 94903, JP)
松尾 靖史 (〒93 新潟県糸魚川市大字青海２２０９番地 電気化学工業株式会社 青海工場内 Niigata, 94903, JP)
TAKEMURA, Kouichi (Oaza-oumi Itoigawa-sh, Niigata 93, 94903, JP)
松尾 靖史 (〒93 新潟県糸魚川市大字青海２２０９番地 電気化学工業株式会社 青海工場内 Niigata, 94903, JP)
TAKEMURA, Kouichi (Oaza-oumi Itoigawa-sh, Niigata 93, 94903, JP)
Application Number:
JP2009/056816
Publication Date:
October 07, 2010
Filing Date:
April 01, 2009
Export Citation:
Assignee:
DENKI KAGAKU KOGYO KABUSHIKI KAISHA (1-1 Nihonbashi-Muromachi 2-chome, Chuo-ku Tokyo, 38, 10383, JP)
電気化学工業株式会社 (〒38 東京都中央区日本橋室町二丁目１番１号 Tokyo, 10383, JP)
MATSUO, Yasufumi (Oaza-oumi Itoigawa-sh, Niigata 93, 94903, JP)
松尾 靖史 (〒93 新潟県糸魚川市大字青海２２０９番地 電気化学工業株式会社 青海工場内 Niigata, 94903, JP)
電気化学工業株式会社 (〒38 東京都中央区日本橋室町二丁目１番１号 Tokyo, 10383, JP)
MATSUO, Yasufumi (Oaza-oumi Itoigawa-sh, Niigata 93, 94903, JP)
松尾 靖史 (〒93 新潟県糸魚川市大字青海２２０９番地 電気化学工業株式会社 青海工場内 Niigata, 94903, JP)
International Classes:
B01J12/00; C01B33/107
Attorney, Agent or Firm:
SONODA, Yoshitaka et al. (SONODA & KOBAYASHI, 34th FloorShinjuku Mitsui Building,1-1, Nishi-Shinjuku 2-chom, Shinjuku-ku Tokyo 34, 16304, JP)
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