Title:
VAPORIZATION DEVICE AND SEPARATOR FOR VAPORIZATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/082674
Kind Code:
A1
Abstract:
This vaporization device is provided with: a vaporization part 20 which vaporizes a liquid material in a manner that reduces particulates contained in the obtained vapor without a decrease in vaporization performance; a separator 30 which is fed with the vapor produced by the vaporization part 20, and separates particulates contained in the vapor from the vapor; and a particulate receptacle DB which is provided below the separator 30 and holds particles X separated by the separator 30.
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Inventors:
TERASAKA MASANORI (JP)
HIRAI SOICHIRO (JP)
NISHIKAWA ICHIRO (JP)
HIRAI SOICHIRO (JP)
NISHIKAWA ICHIRO (JP)
Application Number:
PCT/JP2018/037891
Publication Date:
May 02, 2019
Filing Date:
October 11, 2018
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
International Classes:
C23C16/448; H01L21/205
Foreign References:
| JPH0925578A | 1997-01-28 | |||
| JP2005327864A | 2005-11-24 | |||
| JP2006100737A | 2006-04-13 | |||
| JP2007227471A | 2007-09-06 | |||
| JP2005166860A | 2005-06-23 | |||
| JP2012177193A | 2012-09-13 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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