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Patent Searching and Data


Title:
VAPORIZER FOR LIQUID SURFACE MODIFYING AGENT, AND SURFACE MODIFICATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/161132
Kind Code:
A1
Abstract:
This vaporizer for liquid surface modifying agents is provided with: a medium gas supply unit for supplying a medium gas; a medium gas temperature control unit for controlling the temperature of the medium gas to a predetermined temperature; and a surface modifying agent-containing gas production unit in which the medium gas having been controlled to the predetermined temperature and a liquid surface modifying agent are brought into contact with each other, thereby producing a surface modifying agent-containing gas that contains vapor of the surface modifying agent in the saturated vapor amount at the predetermined temperature in the medium gas.

Inventors:
HUH KEUN-TAE (JP)
Application Number:
PCT/JP2012/062848
Publication Date:
November 29, 2012
Filing Date:
May 18, 2012
Export Citation:
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Assignee:
MEIRITSU COMPONENT CO LTD (JP)
HUH KEUN-TAE (JP)
International Classes:
C23C26/00; B01J7/02
Foreign References:
JPH06349743A1994-12-22
JP2006016685A2006-01-19
JP2003238710A2003-08-27
Attorney, Agent or Firm:
NAGOYA INTERNATIONAL PATENT FIRM (JP)
Nagoya international patent business corporation (JP)
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Claims: