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Title:
VAPORIZER
Document Type and Number:
WIPO Patent Application WO/2010/104150
Kind Code:
A1
Abstract:
A vaporizer provided with: a heating section for heating and subliming a solid raw material to generate a raw material gas; a supply section provided above the heating section and supplying the solid raw material to the heating section; a gas introducing section from which a carrier gas for conveying the raw material gas generated by the heating section is introduced; and a gas lead-out section through which the generated raw material gas is led out together with the carrier gas. The carrier gas introduced from the gas introducing section passes through the heating section.

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Inventors:
KASHIWAGI, Yusaku (650 Mitsuzawa, Hosaka-Cho, Nirasaki-Sh, Yamanashi 92, 〒4070192, JP)
柏木　勇作 (〒92 山梨県韮崎市穂坂町三ツ沢６５０　東京エレクトロン株式会社内 Yamanashi, 〒4070192, JP)
Application Number:
JP2010/054118
Publication Date:
September 16, 2010
Filing Date:
March 11, 2010
Export Citation:
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Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-Chome, Minato-Ku Tokyo, 25, 〒1076325, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
KASHIWAGI, Yusaku (650 Mitsuzawa, Hosaka-Cho, Nirasaki-Sh, Yamanashi 92, 〒4070192, JP)
International Classes:
H01L21/31; B01J7/00; C23C14/24; C23C16/448
Attorney, Agent or Firm:
ITOH, Tadahiko (32nd Floor, Yebisu Garden Place Tower 20-3, Ebisu 4-Chome, Shibuya-K, Tokyo 32, 〒1506032, JP)
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