Title:
VARIABLE CAPACITANCE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/069333
Kind Code:
A1
Abstract:
A variable capacitance apparatus (1) is provided with a fixed substrate (2A), a movable section (3A), drive electrodes (5A, 5B), a RF capacitance electrode (6), and an insulating film (12A). The movable section (3A) faces the fixed substrate (2A), and can change an interval between the movable section and the fixed substrate (2A). The drive electrodes (5A, 5B) face the movable section (3A), and are formed on the fixed substrate (2A). The RF capacitance electrode (6) is formed on the fixed substrate (2A) such that the RF capacitance electrode faces the movable section (3A) and that the RF capacitance electrode is spaced apart from the drive electrodes (5A, 5B). The insulating film (12A) is formed between the movable section (3A) and the drive electrodes (5A, 5B). The level of a voltage to be applied to the drive electrodes (5A, 5B) and the level of a voltage to be applied to the movable section (3A) are periodically switched, and the level of a voltage to be applied to the RF capacitance electrode (6) and the level of the voltage to be applied to the movable section (3A) are always identical to each other.
Inventors:
KONAKA YOSHIHIRO (JP)
KAWATE TOSHIYA (JP)
KAWATE TOSHIYA (JP)
Application Number:
PCT/JP2012/066500
Publication Date:
May 16, 2013
Filing Date:
June 28, 2012
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
KONAKA YOSHIHIRO (JP)
KAWATE TOSHIYA (JP)
KONAKA YOSHIHIRO (JP)
KAWATE TOSHIYA (JP)
International Classes:
B81B3/00; H01G5/16; H01L21/822; H01L27/04
Foreign References:
| JP2009212451A | 2009-09-17 | |||
| JPH052976A | 1993-01-08 | |||
| JPH05172846A | 1993-07-13 | |||
| JP2011042019A | 2011-03-03 |
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
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Claims: