VARIABLE CAPACITANCE DEVICE

WIPO Patent Application WO/2011/092980

A1

Disclosed is a variable capacitance device (1) which is provided with a substrate (2), a beam section (6), a drive capacitance (C1), a variable capacitance (C2), and a drive voltage control circuit (11). The beam section (6) has the cantilever structure and is connected to the substrate (2). The drive capacitance (C1) is configured to face on the beam section (6) and the substrate (2), and displaces the beam section (6) corresponding to an electrostatic attractive force generated when a DC voltage is applied. The variable capacitance is configured to face on the beam section (6) and the substrate (2), and changes the capacitance corresponding to the displacement of the beam section (6). The drive voltage control circuit (11) detects a detection voltage that changes corresponding to the drive capacitance (C1), and controls the DC voltage to be applied to the drive capacitance (C1) so that the detection voltage is close to a desired value.

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SHIBAHARA TERUHISA (JP)

PCT/JP2010/073119

August 04, 2011

December 22, 2010

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MURATA MANUFACTURING CO (JP)
SHIBAHARA TERUHISA (JP)

H01G5/16; H01G5/18

JP2007324336A	2007-12-13
JPH10149950A	1998-06-02
JP2005522162A	2005-07-21
JPH08145717A	1996-06-07
JP2004063854A	2004-02-26

Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)

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