Title:
VARIABLE CAPACITANCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/158708
Kind Code:
A1
Abstract:
The disclosed variable capacitance device (1) is provided with a support board (2), a movable beam (6), underside RF capacitance electrodes (3A, 3B) and underside drive capacitance electrodes (4A, 4B). The movable beam (6) is disposed parallel to the main surface of the support board (2) and is connected to the support board (2). The underside RF capacitance electrodes (3A, 3B) and the underside drive capacitance electrodes (4A, 4B) are formed on the support board (2) with the length dimension thereof aligned with the axial direction of the movable beam (6). The underside drive capacitance electrodes (4A, 4B) deform the moveable beam (6) on the basis of drive capacitance formed between the movable beam (6) and the drive capacitance electrodes (4A, 4B). The underside RF capacitance electrodes (3A, 3B) propagate an RF signal via RF capacitance occurring between the movable beam (6) and the RF capacitance electrodes (3A, 3B). The movable beam (6) is thin along the Z-axis, and is provided with track-like gutters (6A2) that extend along the Y-axis, with the multiple track-like gutters (6A2) being arranged parallel to each other at intervals.
Inventors:
YAMADA HIROSHI (JP)
SHIBAHARA TERUHISA (JP)
SHIBAHARA TERUHISA (JP)
Application Number:
PCT/JP2011/063101
Publication Date:
December 22, 2011
Filing Date:
June 08, 2011
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
YAMADA HIROSHI (JP)
SHIBAHARA TERUHISA (JP)
YAMADA HIROSHI (JP)
SHIBAHARA TERUHISA (JP)
International Classes:
H01G5/16; B81B3/00; H01G5/00; H01G5/01
Foreign References:
| JP2006294866A | 2006-10-26 | |||
| JP2006175557A | 2006-07-06 | |||
| JP2007324336A | 2007-12-13 |
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
Download PDF:
Claims: