Title:
VARIABLE CAPACITANCE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2011/152192
Kind Code:
A1
Abstract:
Provided is a variable capacitance element capable of preventing an MEMS operation failure caused by charge-up without increasing a driving DC voltage. The variable capacitance element (1) is characterized as follows: A movable beam (3) including beam-side capacitance forming portions (3A to 3C) and a support portion (3D) is housed in a chassis. Lower driving electrodes (6A to 6C) and upper driving electrodes (7A to 7C) are provided facing the beam-side capacitance forming portions (3A to 3C). The space inside the chassis is set to a reduced-pressure atmosphere. When a driving DC voltage is applied, the beam-side capacitance forming portions (3A, 3B) are directly faced to the lower driving electrodes (6A, 6B) or the upper driving electrodes (7A, 7B), but the beam-side capacitance forming portion (3C) is not directly faced to the lower driving electrodes (6C) or the upper driving electrodes (7C). The transition from a state in which the driving DC voltage is applied to a state in which the driving DC voltage is not applied makes the displacement of the movable beam (3) overshoot the position in the state in which the driving DC voltage is not applied.
Inventors:
KONAKA Yoshihiro (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
小中義宏 (〒55 京都府長岡京市東神足１丁目１０番１号 株式会社 村田製作所内 Kyoto, 〒6178555, JP)
NIWA Ryosuke (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
丹羽亮介 (〒55 京都府長岡京市東神足１丁目１０番１号 株式会社 村田製作所内 Kyoto, 〒6178555, JP)
小中義宏 (〒55 京都府長岡京市東神足１丁目１０番１号 株式会社 村田製作所内 Kyoto, 〒6178555, JP)
NIWA Ryosuke (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
丹羽亮介 (〒55 京都府長岡京市東神足１丁目１０番１号 株式会社 村田製作所内 Kyoto, 〒6178555, JP)
Application Number:
JP2011/061146
Publication Date:
December 08, 2011
Filing Date:
May 16, 2011
Export Citation:
Assignee:
Murata Manufacturing Co., Ltd. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
株式会社村田製作所 (〒55 京都府長岡京市東神足１丁目１０番１号 Kyoto, 〒6178555, JP)
KONAKA Yoshihiro (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
小中義宏 (〒55 京都府長岡京市東神足１丁目１０番１号 株式会社 村田製作所内 Kyoto, 〒6178555, JP)
NIWA Ryosuke (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
株式会社村田製作所 (〒55 京都府長岡京市東神足１丁目１０番１号 Kyoto, 〒6178555, JP)
KONAKA Yoshihiro (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
小中義宏 (〒55 京都府長岡京市東神足１丁目１０番１号 株式会社 村田製作所内 Kyoto, 〒6178555, JP)
NIWA Ryosuke (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
International Classes:
H01G5/16; B81B3/00
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (1-4-34, Noninbashi Chuo-ku, Osaka-sh, Osaka 11, 〒5400011, JP)
Claims:
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