Title:
VARIABLE CAPACITOR ARRAY
Document Type and Number:
WIPO Patent Application WO/2014/091520
Kind Code:
A1
Abstract:
Provided is a variable capacitor array which excels in capacitance linearity without the chip area becoming larger. N variable capacitor elements (10) are disposed on the same silicon substrate (2). Each variable capacitor element (10) has the following: a fixed capacitor electrode (11); a movable capacitor electrode (12) facing the fixed capacitor electrode (11); and electrostatic actuators (13) that cause the movable capacitor electrode (12) to disjoin with respect to the fixed capacitor electrode (11). At least one fixed-side projection part (14) is formed projecting on the fixed capacitor electrode (11) on an opposing movement facing-surface that faces the movable capacitor electrode (12). Among the n variable capacitor elements (10), each of the fixed-side projection parts (14) are formed to have the same shape and size, and the number of the fixed-side projection parts (14) differs.
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Inventors:
HANIHARA KOJI (JP)
SUGITA TETSURO (JP)
SUGITA TETSURO (JP)
Application Number:
PCT/JP2012/007918
Publication Date:
June 19, 2014
Filing Date:
December 11, 2012
Export Citation:
Assignee:
PIONEER CORP (JP)
PIONEER MICRO TECHNOLOGY CORP (JP)
PIONEER MICRO TECHNOLOGY CORP (JP)
International Classes:
H01G5/16; H01L29/84
Foreign References:
JP2011044556A | 2011-03-03 | |||
JP2012023273A | 2012-02-02 | |||
JP2009218507A | 2009-09-24 | |||
JP2006261480A | 2006-09-28 | |||
JP2009212541A | 2009-09-17 |
Attorney, Agent or Firm:
OCHIAI, MINORU (JP)
Ochiai 稔 (JP)
Ochiai 稔 (JP)
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