Title:
VARIABLE CAPACITY ELEMENT
Document Type and Number:
WIPO Patent Application WO/2010/137447
Kind Code:
A1
Abstract:
Support beams (9) that are set to a width dimension of no more than 4 µm are shaped by ICP etching and then subjected to heat oxidation treatment to oxidise the entire support beams (9). In this way, it is possible to prevent or suppress leakage of the high-frequency signal supplied to the fixed-side signal electrodes (21, 22) provided on the underlying glass substrate (3) into the support section (5) through a movable section (7) and the support beams (9). Also, the movable section (7) may be endowed with a symmetrical structure in the thickness direction thereof, by forming the same using a single-layer silicon substrate (4). In this way, warping of the movable section (7) is suppressed and the electrostatic capacity between the signal electrode (20) on the movable side and the signal electrodes (21, 22) on the fixed side can be set with high precision.
Inventors:
TAKEMURA Koji (10-1, Higashikotari 1-chome, Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
Application Number:
JP2010/057802
Publication Date:
December 02, 2010
Filing Date:
May 07, 2010
Export Citation:
Assignee:
Murata Manufacturing Co., Ltd. (10-1, Higashikotari 1-chome Nagaokakyo-sh, Kyoto 55, 〒6178555, JP)
株式会社村田製作所 (〒55 京都府長岡京市東神足１丁目１０番１号 Kyoto, 〒6178555, JP)
株式会社村田製作所 (〒55 京都府長岡京市東神足１丁目１０番１号 Kyoto, 〒6178555, JP)
International Classes:
H01G5/16
Attorney, Agent or Firm:
HIROSE Kazuhiko (4F. HAP Nishishinjuku Bldg, 1-2 Nishishinjuku 3-chome, Shinjuku-k, Tokyo 23, 〒1600023, JP)
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