Title:
VARIABLE FLOW RATE RATIO TYPE FLUID SUPPLY DEVICE
Document Type and Number:
WIPO Patent Application WO/2008/001484
Kind Code:
A1
Abstract:
A variable flow rate ratio type gas branch/supply device to a chamber for semiconductor
production equipment is reduced in size and cost sharply, and the flow rate ratio
can be regulated easily with high precision. In the variable flow rate ratio type
fluid supply device arranged to branch gas supplied from a flow controller (6)
at a flow rate Q to a first branch conduit (1) and a second branch conduit (2) at predetermined
flow rates (Q1, Q2) and to supply gas from the both branch
conduits (1, 2) into the chamber at a flow rate Q, a first orifice (3) with an opening
area (S1) is provided in the first branch conduit (1), the second branch
conduit (2) is constituted of a plurality of branch conduits (2a-2n) directly
coupled in parallel, orifices (4a-4n) with opening areas (S2a-S2n)
are provided in the branch conduits (2a-2n), respectively, on/off valves (Vb-Vn)
are provided in the branch conduits entirely or partially, and the gas flow at
a flow rate Q is branched to respective branch conduits (1, 2) at a flow rate ratio
Q1/Q2 equal to a ratio between the first orifice (3) in the
first branch conduit (1) and the total opening area S2o of passable
orifices in the second branch conduit (2) by opening or closing the on/off valves
(Vb-Vn) and thereby regulating the total opening area S2o of the passable
orifices in the second branch conduit (2).
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Inventors:
HIRATA KAORU (JP)
SAWADA YOHEI (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
SAWADA YOHEI (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2007/000629
Publication Date:
January 03, 2008
Filing Date:
June 13, 2007
Export Citation:
Assignee:
FUJIKIN KK (JP)
HIRATA KAORU (JP)
SAWADA YOHEI (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
HIRATA KAORU (JP)
SAWADA YOHEI (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
International Classes:
G05D7/06
Foreign References:
| JP2004005308A | 2004-01-08 | |||
| JPH0284913U | 1990-07-03 | |||
| JPS5884313A | 1983-05-20 | |||
| JP2004005308A | 2004-01-08 | |||
| JP2005011258A | 2005-01-13 | |||
| JP2003323217A | 2003-11-14 |
Attorney, Agent or Firm:
SUGIMOTO, Takeo (1-21 Kitahama 2-chome,Chuo-ku, Osaka-sh, Osaka 41, JP)
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