VARIABLE ION GUIDE AND ELECTRON CYCLOTRON RESONANCE ION SOURCE APPARATUS INCLUDING SAME

Title:

VARIABLE ION GUIDE AND ELECTRON CYCLOTRON RESONANCE ION SOURCE APPARATUS INCLUDING SAME

Document Type and Number:

WIPO Patent Application WO/2013/077483

Kind Code:

A1

Abstract:

The variable ion guide can include: a variable chamber having the length thereof adjusted in one direction; one or more guide electrodes connected to the variable chamber and having the position thereof determined through the adjustment of the length of the variable chamber; and an extraction electrode connected to one end of the variable chamber. With the variable ion guide, an electron cyclotron resonance (ECR) ion source can be configured by including the variable ion guide, a plasma chamber, a magnet unit, and a microwave generating unit. According to the variable ion guide and the ECR ion source apparatus, beams having excellent quality and beams of high current can be variously extracted for ion extraction by properly adjusting the electrode shapes and the sizes and positions of the holes formed in the electrodes.

Inventors:

LEE BYOUNG SEOB (KR)
WON MI SOOK (KR)
YOON JANG HEE (KR)
CHOI SE YONG (KR)
OK JUNG WOO (KR)
PARK JIN YONG (KR)
KIM BYOUNG CHUL (KR)

Application Number:

PCT/KR2011/009083

Publication Date:

May 30, 2013

Filing Date:

November 25, 2011

Export Citation:

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Assignee:

KOREA BASIC SCIENCE INST (KR)
LEE BYOUNG SEOB (KR)
WON MI SOOK (KR)
YOON JANG HEE (KR)
CHOI SE YONG (KR)
OK JUNG WOO (KR)
PARK JIN YONG (KR)
KIM BYOUNG CHUL (KR)

International Classes:

H01J37/08; H01J27/02; H01J37/04

Foreign References:

JPH0689681A	1994-03-29
JP2003257329A	2003-09-12
JP2001185073A	2001-07-06
JPH0831358A	1996-02-02
JPH07118859A	1995-05-09

Attorney, Agent or Firm:

KIM, SUN-YOUNG (KR)
김순영 (KR)

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