Title:
VARIABLE RESISTANCE ELEMENT AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2010/150723
Kind Code:
A1
Abstract:
Disclosed is a variable resistance element which has higher reliability, higher integration and excellent insulation characteristics. Specifically disclosed is a variable resistance element wherein a first electrode that is composed of a metal that contains copper as a main component, an oxide film of a valve metal, an ion-conductive layer that contains oxygen, and a second electrode are laminated in this order.
Inventors:
TADA MUNEHIRO (JP)
SAKAMOTO TOSHITSUGU (JP)
YABE YUKO (JP)
SAITO YUKISHIGE (JP)
HADA HIROMITSU (JP)
SAKAMOTO TOSHITSUGU (JP)
YABE YUKO (JP)
SAITO YUKISHIGE (JP)
HADA HIROMITSU (JP)
Application Number:
PCT/JP2010/060430
Publication Date:
December 29, 2010
Filing Date:
June 21, 2010
Export Citation:
Assignee:
NEC CORP (JP)
TADA MUNEHIRO (JP)
SAKAMOTO TOSHITSUGU (JP)
YABE YUKO (JP)
SAITO YUKISHIGE (JP)
HADA HIROMITSU (JP)
TADA MUNEHIRO (JP)
SAKAMOTO TOSHITSUGU (JP)
YABE YUKO (JP)
SAITO YUKISHIGE (JP)
HADA HIROMITSU (JP)
International Classes:
H01L49/00; C23C14/08; C23C16/42; H01L21/316; H01L21/82; H01L27/10; H01L45/00
Domestic Patent References:
WO2007114099A1 | 2007-10-11 | |||
WO2008001712A1 | 2008-01-03 | |||
WO2010079816A1 | 2010-07-15 | |||
WO2010073897A1 | 2010-07-01 |
Foreign References:
JP2009135370A | 2009-06-18 | |||
JP2009043757A | 2009-02-26 | |||
JP2005256166A | 2005-09-22 | |||
JP2006255755A | 2006-09-28 | |||
JP2006334614A | 2006-12-14 | |||
JP2004330233A | 2004-11-25 |
Attorney, Agent or Firm:
MIYAZAKI, Teruo et al. (JP)
Akio Miyazaki (JP)
Akio Miyazaki (JP)
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