Title:
VARIABLE RESISTANCE NONVOLATILE STORAGE DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2011/135843
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing a variable resistance nonvolatile storage device, which includes: a step wherein a plurality of lower layer copper wiring lines (18), each of which has a stripe shape, are formed on a substrate (11); a step wherein electrode seed layers (21), each of which has the stripe-shape, are formed on the surfaces of the lower copper wiring lines (18) by electroless plating; a step wherein interlayer insulating layers (19) are formed on the electrode seed layers (21) and the substrate (11); a step wherein a plurality of memory cell holes (20) are formed in the interlayer insulating layers (19), said memory cell holes reaching the electrode seed layers (21) by penetrating the interlayer insulating layers (19); a step wherein noble metal electrode layers (29) are formed by electroless plating on the surfaces of the electrode seed layers (21) exposed in the memory cell holes (20); a step wherein variable resistance layers (23) connected to the noble metal electrode layers (29) are formed in the memory cell holes (20); and a step wherein, on the interlayer insulating layers (19) and the variable resistance layers (23), a plurality of stripe-shaped upper layer copper wiring lines (24), which are connected to the variable resistance layers (23), and which intersect the lower copper wiring lines (18), are formed.
Inventors:
HIMENO ATSUSHI
SORADA HARUYUKI
MIKAWA TAKUMI
SORADA HARUYUKI
MIKAWA TAKUMI
Application Number:
PCT/JP2011/002432
Publication Date:
November 03, 2011
Filing Date:
April 26, 2011
Export Citation:
Assignee:
PANASONIC CORP (JP)
HIMENO ATSUSHI
SORADA HARUYUKI
MIKAWA TAKUMI
HIMENO ATSUSHI
SORADA HARUYUKI
MIKAWA TAKUMI
International Classes:
H01L27/105; H01L45/00; H01L49/00
Domestic Patent References:
| WO2009139185A1 | 2009-11-19 | |||
| WO2006075574A1 | 2006-07-20 | |||
| WO2007116749A1 | 2007-10-18 | |||
| WO2010119677A1 | 2010-10-21 | |||
| WO2010064340A1 | 2010-06-10 | |||
| WO2010050094A1 | 2010-05-06 |
Attorney, Agent or Firm:
NII, Hiromori (JP)
New house Extensive 守 (JP)
New house Extensive 守 (JP)
Download PDF:
Claims: