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Title:
VARIABLY RESISTANT ELEMENT AND VARIABLY RESISTANT MEMORY DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/007538
Kind Code:
A1
Abstract:
Disclosed is a variably resistant element (100) used in a memory device having a through-hole, cross-point structure. Further disclosed is a variably resistant memory device using same. The variably resistant element (100) is provided with a substrate (7), and an inter-layer insulating layer (3) formed on the substrate. A through-hole (4) is formed so as to penetrate the inter-layer insulating layer; a first variably resistant layer (2) configured from a transition metal oxide is formed outside the through-hole; a second variably resistant layer (5) configured from a transition metal oxide is formed inside the through-hole; the resistance of the first variably resistant layer and the second variably resistant layer are different; and the first variably resistant layer and the second variably resistant layer are formed so as to connect with one another only at the aperture (20) on the side that is towards the substrate of the through-hole.

Inventors:
ARITA KOJI
MIKAWA TAKUMI
HIMENO ATSUSHI
KAWASHIMA YOSHIO
TOMINAGA KENJI
Application Number:
PCT/JP2010/004498
Publication Date:
January 20, 2011
Filing Date:
July 12, 2010
Export Citation:
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Assignee:
PANASONIC CORP (JP)
ARITA KOJI
MIKAWA TAKUMI
HIMENO ATSUSHI
KAWASHIMA YOSHIO
TOMINAGA KENJI
International Classes:
H01L27/10; H01L45/00; H01L49/00
Domestic Patent References:
WO2009050833A12009-04-23
WO2007102341A12007-09-13
WO2009081595A12009-07-02
Foreign References:
JP2007287761A2007-11-01
JP2008085071A2008-04-10
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (JP)
Patent business corporation Owner old patent firm (JP)
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