Title:
VERTICAL-CAVITY SURFACE-EMITTING LASER MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/009911
Kind Code:
A1
Abstract:
In the present invention, in a vertical-cavity surface-emitting laser manufacturing method, a lateral surface of an oxidation layer is exposed due to the processing of a laminated body which includes the oxidation layer, and then a current constriction layer is formed according to a heated water vapor oxidizing process. The heated water vapor oxidizing process includes: a step in which a substrate (110), which includes the processed laminated body, is placed on a stage (102) provided inside of a chamber (101) the interior of which can be made airtight; a step in which, in a purified water tank (122) which is outside of the chamber (101), a water vapor gas is generated by heating the purified water in a vacuum atmosphere; and a step in which the water vapor gas is subjected to flow-rate control and supplied to the inside of the chamber (101) which has a vacuum atmosphere.
Inventors:
UEDA TAKASHI (JP)
SUZUKI ARATA (JP)
SEKI HITOSHI (JP)
SUZUKI ARATA (JP)
SEKI HITOSHI (JP)
Application Number:
PCT/JP2015/069613
Publication Date:
January 21, 2016
Filing Date:
July 08, 2015
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01S5/183; H01L21/205; H01L21/31; H01L21/316
Foreign References:
| JP2006040943A | 2006-02-09 | |||
| JP2009174044A | 2009-08-06 | |||
| JP2011018876A | 2011-01-27 | |||
| JP2003179309A | 2003-06-27 | |||
| JP2008218774A | 2008-09-18 | |||
| JP2005203411A | 2005-07-28 | |||
| JP2007242785A | 2007-09-20 | |||
| JP2003090504A | 2003-03-28 | |||
| JP2013527800A | 2013-07-04 | |||
| JPH07147276A | 1995-06-06 |
Attorney, Agent or Firm:
Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)
Patent business corporation Fukami patent firm (JP)
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