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Title:
VERTICAL-CAVITY SURFACE-EMITTING LASER EMPLOYING METASURFACE STRUCTURE, AND MANUFACTURING METHOD FOR SAME
Document Type and Number:
WIPO Patent Application WO/2020/019574
Kind Code:
A1
Abstract:
A vertical-cavity surface-emitting laser employing a metasurface structure, comprising: a lower broadband mirror (2), a gain medium (3), and an upper narrowband mirror (4) having a metasurface structure. A reflection spectrum of the broadband mirror, a light emission spectrum of the gain medium, and a narrowband reflection wavelength of the mirror having a metasurface structure overlap. The gain medium is first excited by a pump source, and then optical amplification of excited radiation light is achieved by a vertical resonance cavity consisting of the broadband mirror and the narrowband mirror having a metasurface structure, thereby realizing laser emission from a vertical cavity surface. Further disclosed is a manufacturing method, comprising: designing and fabricating a broadband mirror on a substrate material; designing a structure of a gain medium, and performing epitaxial growth thereof; designing and fabricating a narrowband mirror having a metasurface structure; and obtaining a vertical-cavity surface-emitting laser employing a metasurface structure. The vertical-cavity surface-emitting laser employing a metasurface structure of the invention has a simple and compact structure, is compatible with existing processes of semiconductor lasers, and has a simple manufacturing process, a single longitudinal mode, and superior stability.

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Inventors:
XIA JINSONG (CN)
WANG YUXI (CN)
ZENG CHENG (CN)
YUAN SHUAI (CN)
Application Number:
PCT/CN2018/114703
Publication Date:
January 30, 2020
Filing Date:
November 09, 2018
Export Citation:
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Assignee:
UNIV HUAZHONG SCIENCE TECH (CN)
International Classes:
H01S5/183; H01S5/12
Foreign References:
CN107257084A2017-10-17
CN108254945A2018-07-06
CN106918850A2017-07-04
CN107275796A2017-10-20
CN106483594A2017-03-08
Attorney, Agent or Firm:
HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY PATENT AGENCY CENTER (CN)
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