Title:
VERTICAL HEAT TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/1997/046842
Kind Code:
A1
Abstract:
A vertical heat treatment device with a good uniformity and repeatability. A heater (21) of a heating furnace (2) is at the side of the heat treatment region (13) in a process chamber (1). Therefore the heat temperature distribution in the process chamber (1) is such that the temperature at the heat treatment region (13) is the highest and gradually decreases downward.
Inventors:
YAMADA YOSHIMITSU (JP)
OGINO KOZO (JP)
OGINO KOZO (JP)
Application Number:
PCT/JP1996/002484
Publication Date:
December 11, 1997
Filing Date:
August 30, 1996
Export Citation:
Assignee:
NIPPON PILLAR PACKING (JP)
YAMADA YOSHIMITSU (JP)
OGINO KOZO (JP)
YAMADA YOSHIMITSU (JP)
OGINO KOZO (JP)
International Classes:
H05B3/00; C23C16/44; C23C16/46; C30B25/10; C30B31/12; F27B1/09; F27B17/00; H01L21/00; H01L21/205; H01L21/22; H01L21/26; H01L21/31; H01L21/324; (IPC1-7): F27B1/09; H01L21/22
Foreign References:
| JPH0693439B2 | 1994-11-16 | |||
| JPH0693440B2 | 1994-11-16 | |||
| JPH07193020A | 1995-07-28 |
Other References:
See also references of EP 0848223A4
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