VERTICAL HEAT TREATMENT EQUIPMENT AND METHOD FOR TRANSFERRING OBJECT TO BE TREATED

Title:

VERTICAL HEAT TREATMENT EQUIPMENT AND METHOD FOR TRANSFERRING OBJECT TO BE TREATED

Document Type and Number:

WIPO Patent Application WO/2005/093354

Kind Code:

A1

Abstract:

An improved transfer mechanism (21) is provided for vertical heat treatment equipment. The transfer mechanism transfers a treating object W between a treating object storing container (carrier) (16) and a treating object holder (boat) (9), which holds a plurality of the treating objects at intervals in the vertical direction through a ring-shaped supporting board (15). The transfer mechanism (21) is provided with a plurality of substrate supports (20) arranged at prescribed intervals, and each substrate support (20) has a holding mechanism (28) to hold the treating object W at a lower side. Each holding mechanism (28) is provided with a fixed locking part (30), which is fixed at a leading edge part of the substrate support (20) and locks a front edge part of the treating object W, and a movable locking part (31), which is movably provided at a base edge part of the substrate support (20) and removably locks a rear edge part of the treating object W. A plurality of the treating objects W are quickly and surely transferred at the same time. A thickness of the substrate support (20) is reduced by the constitution of the simple holding mechanism (28), an arrangement pitch of the ring-shaped supporting boards (15) can be reduced, and a number of the object W to be treated which can be processed at one time in a heat treatment furnace is increased. Due to these factors, throughput is improved.

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Inventors:

ASARI SATOSHI (JP)
MIHARA KATSUHIKO (JP)
KIKUCHI HIROSHI (JP)

Application Number:

PCT/JP2005/005518

Publication Date:

October 06, 2005

Filing Date:

March 25, 2005

Export Citation:

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Assignee:

TOKYO ELECTRON LTD (JP)
ASARI SATOSHI (JP)
MIHARA KATSUHIKO (JP)
KIKUCHI HIROSHI (JP)

International Classes:

F27B5/04; F27B5/12; F27B5/13; F27B17/00; F27D3/12; H01L21/22; B65G49/07; H01L21/31; H01L21/324; H01L21/67; H01L21/677; H01L21/68; H01L21/683; H01L21/687; (IPC1-7): F27B5/12; B65G49/07; F27B5/13; F27D3/12; H01L21/22; H01L21/68

Foreign References:

JP2001267262A

2001-09-28

Other References: