Title:
VERTICAL MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDER HAVING SAME, VERTICAL MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD, AND VERTICAL MAGNETIC RECORDING MEDIUM MANUFACTURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2003/083842
Kind Code:
A1
Abstract:
A vertical magnetic recording medium having a low-noise characteristic compared to media of a permalloy or sendust crystalline material, comprising a high-flatness soft magnetic backing layer, and enabling recording/reproduction of information at high recording density, a magnetic recorder provided with the vertical magnetic recording medium, a vertical magnetic recording medium manufacturing method, and a vertical magnetic recording medium manufacturing apparatus are disclosed. The vertical magnetic recording medium (1) has a multilayer structure on a substrate (2), in which a soft magnetic backing layer (3), a vertical recording layer (4) of a ferromagnetic body, and a protective layer (5) are formed. The soft magnetic backing layer (3) is formed of an FeSiAlN film of a soft magnetic material. The atom% of each element of Fe, Si, Al, and N of the FeSiAlN film can be changed by changing the flow rate of N2 gas in a mixture gas of N2 gas and Ar gas introduced into the chamber.
Inventors:
TAKAHASHI MIGAKU (JP)
SAITO SHIN (JP)
DJAYAPRAWIRA DAVID (JP)
SAITO SHIN (JP)
DJAYAPRAWIRA DAVID (JP)
Application Number:
PCT/JP2003/003439
Publication Date:
October 09, 2003
Filing Date:
March 20, 2003
Export Citation:
Assignee:
TAKAHASHI MIGAKU (JP)
SAITO SHIN (JP)
DJAYAPRAWIRA DAVID (JP)
ANELVA CORP (JP)
FUJI ELECTRIC CO LTD (JP)
SHOWA DENKO KK (JP)
SAITO SHIN (JP)
DJAYAPRAWIRA DAVID (JP)
ANELVA CORP (JP)
FUJI ELECTRIC CO LTD (JP)
SHOWA DENKO KK (JP)
International Classes:
B32B15/01; C22C38/02; C22C38/06; C23C28/00; G11B5/66; G11B5/667; G11B5/73; G11B5/84; G11B5/851; H01F10/14; H01F41/14; (IPC1-7): G11B5/667; G11B5/851; C22C38/00
Foreign References:
| JPH11134634A | 1999-05-21 | |||
| JP2001176048A | 2001-06-29 | |||
| JPH11203654A | 1999-07-30 | |||
| JPH11185237A | 1999-07-09 | |||
| JPS57176531A | 1982-10-29 | |||
| JPS5736435A | 1982-02-27 |
Other References:
Naohito HAYASHI, "Fe-Si-A1-N Jisei Hakumaku no Jiki Tokusei ni Oyobosu S1O2 Kachimaku no Koka", The Institute of Electronics, Information and Communication Engineers Zenkoku Taikai Koen Ronbunshu, March, 1989, Vol.1989, No.Spring Pt.5, pages.5 to 342
Naohito HAYASHI, "Fe-Si-A1-N Gokin Hakumaku o Mochiita Suichoku Jiki Head", The Institute of Electronics, Information and Communication Engineers Zenkoku Taikai Koen Ronbunshu, March, 1988, Vol.1988, No.Spring Pt.2, pages 2 to 19
Daishun Zheng, "Study on The Fe-A1-N Soft Magnetic Thin Films", The Institute of Electronics, Information and Communication Engineers Gijutsu Kenkyu Hokoku, 08 November, 2000 (08.11.00), Vol.100, No.423, pages 73 to 78
Hirotaka Hokkyo, "Media Noise Characteristics of CoCrTa/FeSiA1 Perpendicular Magnetic Recording Media", Journal of The Magnetics Society of Japan, 1997, Vol.21, Supplement No.S2, pages 517 to 520
Naohito HAYASHI, "Fe-Si-A1-N Gokin Hakumaku o Mochiita Suichoku Jiki Head", The Institute of Electronics, Information and Communication Engineers Zenkoku Taikai Koen Ronbunshu, March, 1988, Vol.1988, No.Spring Pt.2, pages 2 to 19
Daishun Zheng, "Study on The Fe-A1-N Soft Magnetic Thin Films", The Institute of Electronics, Information and Communication Engineers Gijutsu Kenkyu Hokoku, 08 November, 2000 (08.11.00), Vol.100, No.423, pages 73 to 78
Hirotaka Hokkyo, "Media Noise Characteristics of CoCrTa/FeSiA1 Perpendicular Magnetic Recording Media", Journal of The Magnetics Society of Japan, 1997, Vol.21, Supplement No.S2, pages 517 to 520
Attorney, Agent or Firm:
Yamaguchi, Iwao c/o YAMAGUCHI International Patent Office (3-2 Higashigotanda 2-chom, Shinagawa-ku Tokyo, JP)
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