Title:
VERY THIN PERPENDICULARLY MAGNETIZED FILM EXHIBITING HIGH PERPENDICULAR MAGNETIC ANISOTROPY, METHOD FOR MANUFACTURING SAME, AND APPLICATION
Document Type and Number:
WIPO Patent Application WO/2013/141337
Kind Code:
A1
Abstract:
Provided are an element structure in which a magnetic layer has a high magnetic anisotropic constant and saturated magnetization properties in a thickness of 1.5 nm or less, and a magnetic device that uses the element structure. A BCC metal oxide/CoFeB/MgO film composition that uses a nitride of a BCC metal as a seed layer is fabricated. The nitride amount of the BCC metal nitride is preferably kept to less than 60% in terms of volume ratio in relation to 100% BCC metal. It is thereby possible to readily obtain a perpendicularly magnetized film having magnetic properties in which the perpendicular magnetic anisotropy is 0.1 × 106 erg/cm3 or more and the saturated magnetization is 200 emu/cm3 or more, even when the thickness of the magnetic layer is 0.3 nm to 1.5 nm inclusive.
Inventors:
HAYASHI MASAMITSU (JP)
JAIVARDHAN SINHA (JP)
KODZUKA MASAYA (JP)
NAKATANI TOMOYA (JP)
TAKAHASHI YUKIKO (JP)
FURUBAYASHI TAKAO (JP)
MITANI SEIJI (JP)
HONO KAZUHIRO (JP)
JAIVARDHAN SINHA (JP)
KODZUKA MASAYA (JP)
NAKATANI TOMOYA (JP)
TAKAHASHI YUKIKO (JP)
FURUBAYASHI TAKAO (JP)
MITANI SEIJI (JP)
HONO KAZUHIRO (JP)
Application Number:
PCT/JP2013/058226
Publication Date:
September 26, 2013
Filing Date:
March 22, 2013
Export Citation:
Assignee:
NAT INST FOR MATERIALS SCIENCE (JP)
International Classes:
G11B5/64; G11B5/65; G11B5/738; G11B5/84; H01F10/16; H01F10/32; H01L21/8246; H01L27/105; H01L29/82; H01L43/08; H01L43/10
Foreign References:
| JP2011023729A | 2011-02-03 | |||
| JP2011146089A | 2011-07-28 | |||
| JP2010118147A | 2010-05-27 | |||
| JP2008097685A | 2008-04-24 |
Attorney, Agent or Firm:
ASAMURA PATENT OFFICE, p. c. (JP)
Patent business corporation Asamura patent firm (JP)
Patent business corporation Asamura patent firm (JP)
Download PDF: