Title:
VIBRATING BARREL POLISHING METHOD AND VIBRATING BARREL POLISHING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2017/170257
Kind Code:
A1
Abstract:
One embodiment of the present invention provides a vibrating barrel polishing method that uses a vibrating barrel polishing system which comprises a polishing tank that has a bottom surface therein, and a polishing jig that can hold a workpiece and can rotate around a rotational axis. The method includes: a step for supporting the polishing jig inside of the polishing tank in such a manner that the bottommost part of the polishing jig is separated from the bottom surface, the separation distance d between the bottommost part of the polishing jig and the bottom surface being equal to or greater than the particle size of a polishing media; a step for causing the polishing media to flow inside of the polishing tank; and a step for rotating the polishing jig around the rotational axis in such a manner that the bottommost part of the polishing jig is separated from the bottom surface.
Inventors:
TANAHASHI SHIGERU (JP)
OGIWARA NAOYUKI (JP)
OGIWARA NAOYUKI (JP)
Application Number:
PCT/JP2017/012110
Publication Date:
October 05, 2017
Filing Date:
March 24, 2017
Export Citation:
Assignee:
SINTOKOGIO LTD (JP)
International Classes:
B24B31/06; B24B31/12
Foreign References:
| JPH0970748A | 1997-03-18 | |||
| US3464163A | 1969-09-02 | |||
| JP2015027709A | 2015-02-12 | |||
| JPH04269161A | 1992-09-25 | |||
| DE2344639A1 | 1975-03-13 | |||
| JPH09234662A | 1997-09-09 |
Other References:
See also references of EP 3395501A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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