Title:
VIBRATION DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/123144
Kind Code:
A1
Abstract:
A vibrating member (120) extends in a first direction (up/down direction in the drawing). A piezoelectric element (110) is fixed to a face of the vibrating member (120) that extends in the first direction. A first fixed member (130) is fixed to one end (top end in the drawing) of the vibrating member (120). A second fixed member (140) is fixed to the other end (bottom end in the drawing) of the vibrating member (120). A first elastic member (150) is plate shaped, can elastically deform in the thickness direction thereof, and has a larger surface area than the first fixed member (130) in plan view. The first fixed member (130) is also fixed to a first face (bottom face in the drawing) of the first elastic member (150). A retaining member (160) retains an edge of the first elastic member (150).
More Like This:
Inventors:
SASAKI YASUHIRO (JP)
TAKAHASHI MASATAKE (JP)
MATAGA JUNICHIRO (JP)
SHINODA SHIGEKI (JP)
TAKAHASHI MASATAKE (JP)
MATAGA JUNICHIRO (JP)
SHINODA SHIGEKI (JP)
Application Number:
PCT/JP2014/052646
Publication Date:
August 14, 2014
Filing Date:
February 05, 2014
Export Citation:
Assignee:
NEC CORP (JP)
International Classes:
G01H11/08; H01L41/113
Foreign References:
| JPH02140329U | 1990-11-22 | |||
| JPS5269282U | 1977-05-23 | |||
| JPS5679221A | 1981-06-29 | |||
| JPS524867U | 1977-01-13 | |||
| JPH0241131U | 1990-03-22 | |||
| JP2010048798A | 2010-03-04 | |||
| JPS62134037U | 1987-08-24 | |||
| JPS436592B |
Attorney, Agent or Firm:
HAYAMI SHINJI (JP)
Shinji Hayami (JP)
Shinji Hayami (JP)
Download PDF: