Title:
VIBRATION DETECTION ELEMENT AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2019/026456
Kind Code:
A1
Abstract:
A vibration detection element (10) is provided with base material sections (1-3), a supporting member (22), a supporting member (32), and a vibrator (4). The base material sections (1-3) include a space section (SP) having a bottom surface (21A) and a bottom surface (31A) facing the bottom surface (21A). The supporting member (22) protrudes in the direction from the bottom surface (21A) to the bottom surface (31A) of the space section (SP). The supporting member (32) protrudes in the direction from the bottom surface (31A) to the bottom surface (21A) of the space section. The vibrator (4) is disposed in contact with the supporting member (22) or the supporting member (32) such that the vibrator can vibrate in the space section (SP), said vibrator having a thickness less than 10 μm. Each of the supporting members (22, 32) includes a plurality of supporting sections that prevent the vibrator (4) from coming into contact with the bottom surface (21A) or the bottom surface (31A).
Inventors:
KATO FUMIHITO (JP)
OGI HIROTSUGU (JP)
NONAKA TOMOYUKI (JP)
OGI HIROTSUGU (JP)
NONAKA TOMOYUKI (JP)
Application Number:
PCT/JP2018/023549
Publication Date:
February 07, 2019
Filing Date:
June 21, 2018
Export Citation:
Assignee:
UNIV OSAKA (JP)
SAMCO INC (JP)
KATO FUMIHITO (JP)
SAMCO INC (JP)
KATO FUMIHITO (JP)
International Classes:
G01N5/02; B81B3/00
Domestic Patent References:
| WO2011121859A1 | 2011-10-06 |
Foreign References:
| JP2014002014A | 2014-01-09 | |||
| US20120195797A1 | 2012-08-02 | |||
| JP2001156580A | 2001-06-08 | |||
| US7802356B1 | 2010-09-28 | |||
| JPS601342B2 | 1985-01-14 |
Other References:
See also references of EP 3663743A4
Attorney, Agent or Firm:
MATSUYAMA Takao (JP)
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