Title:
VIBRATION DEVICE AND METHOD FOR MANUFACTURING VIBRATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/048201
Kind Code:
A1
Abstract:
This vibration device comprises a first substrate, a second substrate, an intermediate layer, and an excitation electrode. The first substrate has a first surface. The second substrate has a second surface facing the first surface. The intermediate layer is located between the first surface and the second surface. The first surface has a first recess. The intermediate layer has a vibrating part and a frame part. The vibrating part has an excitation part in which the excitation electrode is located. The excitation part faces the first recess. The frame part surrounds the vibrating part in a plan view and is joined to the first surface and the second surface. The frame part includes a layer made of the same material as the layer included in the vibrating part. The outer edge of the vibrating part is separated from the frame part over the entire circumference thereof. The vibrating part is joined to the outer peripheral region of the first recess on the first surface.
Inventors:
KAWAGUCHI YOSHIYUKI (JP)
AONO SHIGEO (JP)
AONO SHIGEO (JP)
Application Number:
PCT/JP2023/028524
Publication Date:
March 07, 2024
Filing Date:
August 04, 2023
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H03H9/19
Domestic Patent References:
| WO2019044490A1 | 2019-03-07 |
Foreign References:
| JP2022099603A | 2022-07-05 | |||
| JP2008271491A | 2008-11-06 | |||
| JP2013232736A | 2013-11-14 | |||
| JP2006339701A | 2006-12-14 |
Attorney, Agent or Firm:
IIJIMA, YASUHIRO (JP)
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