Title:
VIBRATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/047745
Kind Code:
A1
Abstract:
This vibration device comprises a first substrate, a second substrate, an intermediate layer, and an excitation electrode. The first substrate has a first surface. The second substrate has a second surface facing the first surface. The intermediate layer is located between the first surface and the second surface. The first surface has a first recess. The intermediate layer has a vibrating portion and a frame portion. The vibrating portion has an excitation portion where the excitation electrode is located. The excitation portion faces the first recess. The frame portion surrounds the vibrating portion in plan view, and is bonded to the first surface and the second surface. The entire peripheral edge of the vibrating portion is separated from the frame portion. The vibrating portion is bonded to the peripheral area of the first recess of the first surface.
Inventors:
KAWAGUCHI YOSHIYUKI (JP)
AONO SHIGEO (JP)
AONO SHIGEO (JP)
Application Number:
PCT/JP2022/032580
Publication Date:
March 07, 2024
Filing Date:
August 30, 2022
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H03H9/02; H03H9/19
Domestic Patent References:
| WO2006001125A1 | 2006-01-05 |
Foreign References:
| JP2013232736A | 2013-11-14 | |||
| JP2013162030A | 2013-08-19 | |||
| JP2015090988A | 2015-05-11 | |||
| JP2009130672A | 2009-06-11 | |||
| JP2017060054A | 2017-03-23 | |||
| JP2012191446A | 2012-10-04 | |||
| JP2008060382A | 2008-03-13 | |||
| JP2010246001A | 2010-10-28 |
Attorney, Agent or Firm:
IIJIMA, Yasuhiro (JP)
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