Title:
VIBRATION ELIMINATOR, ALIGNER AND PROJECTION EXPOSURE METHOD
Document Type and Number:
WIPO Patent Application WO/1999/026120
Kind Code:
A1
Abstract:
The columns (48) of an aligner are placed on a surface plate (20). Actuators (46A-46D) are provided between the surface plate (20) and the leg parts (48a-48d) of the column (48). Acceleration sensors (50A-50D and 52A-52D) are attached to the surface plate (20) and the leg parts (48a-48d) of the column (48) near the leg parts (48a-48d) of the column (48) respectively. Relative vibrations in +/-Z directions which are generated between the surface plate (20) and the column (48) are detected by the acceleration sensors (50A-50D and 52A-52D) and, in accordance with the detection results, driving forces generated by the actuators (46A-46D) in +/-Z directions are controlled. Further, vibration eliminators are attached to the important points of the surface plate (20), the column (48) or a lower base (25) and vibrations generated locally in the surface plate (20), the column (48) or the lower base (25) are reduced by the vibration eliminators.
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Inventors:
TAKAHASHI MASATO (JP)
ONO KAZUYA (JP)
ONO KAZUYA (JP)
Application Number:
PCT/JP1998/005173
Publication Date:
May 27, 1999
Filing Date:
November 18, 1998
Export Citation:
Assignee:
NIKON CORP (JP)
TAKAHASHI MASATO (JP)
ONO KAZUYA (JP)
TAKAHASHI MASATO (JP)
ONO KAZUYA (JP)
International Classes:
F16F15/02; G05D19/02; (IPC1-7): G05D19/02
Foreign References:
| JPH09184536A | 1997-07-15 | |||
| JPH09166176A | 1997-06-24 | |||
| JPH0642578A | 1994-02-15 |
Attorney, Agent or Firm:
Nagai, Fuyuki (Kasumigaseki 3-chome Chiyoda-ku Tokyo, JP)
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