Title:
VIBRATION ISOLATION CONTROL DEVICE AND VIBRATION ISOLATION CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2021/176617
Kind Code:
A1
Abstract:
A vibration isolation control device (4) is characterized by controlling a drive device (3) which drives a first movable part (301) by means of a first motor (302) fixed to a mount (2), and which also drives a second movable part (311) by means of a second motor (312) fixed to the mount (2), and is further characterized by comprising: a first control unit (40) which controls the position or speed of the first motor (302) such that the first movable part (301) follows a time-series follow command (10); and a second control unit (41) which controls the position or speed of the second motor (312) to be proportional to a vibration suppression command (11), which is a position or speed dimension command corresponding to a vibration frequency component of the mount (2), said vibration frequency component being included in the follow command (10).
Inventors:
IGARASHI YUJI (JP)
HIGASHINO MAKOTO (JP)
KIZU YUICHI (JP)
KAI TAKASHI (JP)
SEKIGUCHI HIROYUKI (JP)
IKEDA HIDETOSHI (JP)
HIGASHINO MAKOTO (JP)
KIZU YUICHI (JP)
KAI TAKASHI (JP)
SEKIGUCHI HIROYUKI (JP)
IKEDA HIDETOSHI (JP)
Application Number:
PCT/JP2020/009261
Publication Date:
September 10, 2021
Filing Date:
March 04, 2020
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G05D3/12; F16F15/02; H02P5/46
Domestic Patent References:
| WO2016125804A1 | 2016-08-11 |
Foreign References:
| JP6422624B1 | 2018-11-14 | |||
| JP2010041734A | 2010-02-18 | |||
| JP2012052666A | 2012-03-15 |
Attorney, Agent or Firm:
TAKAMURA, Jun (JP)
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