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Title:
VIBRATION ISOLATION DEVICE AND VIBRATION ISOLATION METHOD
Document Type and Number:
WIPO Patent Application WO/2007/007580
Kind Code:
A1
Abstract:
[PROBLEMS] To provide a low cost vibration isolation device capable of isolating vibration caused by ground motion disturbance and direct acting disturbance and realizing zero-compliance over a wide load range. [MEANS FOR SOLVING PROBLEMS] This vibration isolation device comprises a support mechanism supporting a vibration-isolated member (34) having an active first support mechanism (31) with an actuator and a low rigid second support mechanism (32) arranged in series with the first support mechanism (31). The displacement of the actuator of the first support mechanism (31) is controlled to offset the displacement of the second support mechanism (32). Accordingly, even if the vibration due to the ground motion disturbance and the direct acting disturbance occurs, the position of the vibration-isolated member (34) is not changed. The vibration isolation device can isolate the vibration caused by the ground motion disturbance and the direct acting disturbance, realize the zero-compliance over the wide load range, and comprises high reliability. Furthermore, the vibration isolation device can be manufactured at low cost.

Inventors:
MIZUNO, Takeshi (255 Shimo-Okubo, Sakura-k, Saitama City Saitama 70, 3388570, JP)
Application Number:
JP2006/313243
Publication Date:
January 18, 2007
Filing Date:
July 03, 2006
Export Citation:
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Assignee:
National university corporation SAITAMA UNIVERSITY (255 Shimo-Okubo, Sakura-ku Saitama Cit, Saitama 70, 3388570, JP)
国立大学法人 埼玉大学 (〒70 埼玉県さいたま市桜区下大久保255 Saitama, 3388570, JP)
International Classes:
F16F15/02; B23Q1/00; B23Q11/00; G03F7/20; H01L21/027; F16F15/02; B23Q1/00; B23Q11/00; G03F7/20; H01L21/02
Attorney, Agent or Firm:
OHASHI, Koji (OhashiPatentOffice Omorikopobianezu #504, 16-12 Minamioi 6-chom, Sinagawa-ku Tokyo13, Tokyo1400013, JP)
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