Title:
VIBRATION ISOLATOR, EXPOSURE APPARATUS, AND VIBRATION ISOLATING METHOD
Document Type and Number:
WIPO Patent Application WO/2005/085671
Kind Code:
A1
Abstract:
An active vibration isolator having an improved vibration isolation performance. The vibration isolator has an air damper (43) supporting a structure and a drive section for controlling the internal pressure of the air damper and further has a position sensor (49) for measuring the position of the structure, a subtractor (51) for generating difference information on the difference between the target position of the structure and the measured position, a variable amplifier (52) for controlling the drive section according to the difference information, variable amplifiers (58, 60, 63) for feed-backing the information for controlling the natural frequency of the system including the air damper (43) and the structure to the drive section by using the integration characteristic of the air damper (43), and an amplifier (68) for feed-backing the internal information on the air damper (43) to the drive section.
Inventors:
TAKAHASHI MASATO (JP)
DOSHO TOMONORI (JP)
WAKUI SHINJI (JP)
DOSHO TOMONORI (JP)
WAKUI SHINJI (JP)
Application Number:
PCT/JP2005/003735
Publication Date:
September 15, 2005
Filing Date:
March 04, 2005
Export Citation:
Assignee:
NIKON CORP (JP)
TAKAHASHI MASATO (JP)
DOSHO TOMONORI (JP)
WAKUI SHINJI (JP)
TAKAHASHI MASATO (JP)
DOSHO TOMONORI (JP)
WAKUI SHINJI (JP)
International Classes:
F16F15/027; (IPC1-7): F16F15/027
Foreign References:
| JP2000154843A | 2000-06-06 | |||
| JP2001140972A | 2001-05-22 | |||
| JP2002175122A | 2002-06-21 | |||
| JP2000012435A | 2000-01-14 | |||
| JP2000228343A | 2000-08-15 | |||
| JP2000274482A | 2000-10-03 | |||
| JPH11327657A | 1999-11-26 | |||
| JP2001355669A | 2001-12-26 | |||
| JP2001090774A | 2001-04-03 | |||
| JPH11315883A | 1999-11-16 |
Attorney, Agent or Firm:
Omori, Satoshi (2075-2-501 Noborito, Tama-k, Kawasaki-shi Kanagawa 14, JP)
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