Title:
VIBRATION POWER GENERATION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2022/191011
Kind Code:
A1
Abstract:
Provided is a vibration power generation element which is capable of improving mechanical robustness and improving other properties while reducing costs. A substrate (10) supported in a cantilevered state by a support member (11) has a piezoelectric layer (20) formed thereon with a dielectric layer (102) interposed therebetween. The piezoelectric layer (20) has a pair of comb electrodes (41, 42) formed thereon which have comb sections (412, 422) which are positioned so as to be fitted into one another and extend in a direction (short direction) which is perpendicular to the direction (lengthwise direction) in which the substrate 10 extends.
Inventors:
KAWAKAMI YOSHIHIRO (JP)
Application Number:
PCT/JP2022/008981
Publication Date:
September 15, 2022
Filing Date:
March 02, 2022
Export Citation:
Assignee:
RES INSTITUTE FOR ELECTROMAGNETIC MATERIALS (JP)
International Classes:
H01L41/047; B81B3/00; H01L41/113; H01L41/187; H01L41/29; H03H9/145; H03H9/25
Foreign References:
| JP2016184805A | 2016-10-20 | |||
| JP2019507546A | 2019-03-14 | |||
| US20150076966A1 | 2015-03-19 | |||
| JP2022010828A | 2022-01-17 |
Attorney, Agent or Firm:
SATO & ASSOCIATES (JP)
Download PDF:
Previous Patent: INFORMATION PROCESSING DEVICE AND INFORMATION PROCESSING METHOD
Next Patent: DISPLAY DEVICE
Next Patent: DISPLAY DEVICE