Title:
VIBRATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2005/024360
Kind Code:
A1
Abstract:
A vibration sensor in which a vibration film electrode can be protected against breakage while deterioration of sensitivity being avoided and assembling work can be improved. The vibration sensor comprises a fixed electrode (1) and a vibration film electrode (3) provided with a weight (2) to the film surface on the side opposite the side facing the fixed electrode (1) and supported fixedly on the periphery, and can output as an vibration signal a variation in capacitance between the fixed electrode (1) and the vibration film electrode (3). A protrusion (2a) protruding along the film surface direction while being spaced apart from the film surface of the vibration film electrode (3) is formed partially at the end part of the weight (2), and a member (4) capable of regulating displacement of the weight (2) by being contact with the protrusion (2a) of the weight (2) displacing along the film surface direction of the vibration film electrode (3) is provided.
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Inventors:
YASUDA MAMORU (JP)
SUGIMORI YASUO (JP)
OHTSUJI TAKAHISA (JP)
SUGIMORI YASUO (JP)
OHTSUJI TAKAHISA (JP)
Application Number:
PCT/JP2004/012512
Publication Date:
March 17, 2005
Filing Date:
August 31, 2004
Export Citation:
Assignee:
HOSIDEN CORP (JP)
YASUDA MAMORU (JP)
SUGIMORI YASUO (JP)
OHTSUJI TAKAHISA (JP)
YASUDA MAMORU (JP)
SUGIMORI YASUO (JP)
OHTSUJI TAKAHISA (JP)
International Classes:
G01H3/00; G01H11/06; G01H11/08; H04R11/00; H04R19/01; H04R19/04; (IPC1-7): G01H11/08
Foreign References:
| JPH11248737A | 1999-09-17 | |||
| JPH0658949A | 1994-03-04 | |||
| JPS5979700A | 1984-05-08 | |||
| JP2001267588A | 2001-09-28 |
Attorney, Agent or Firm:
Kitamura, Shuichiro (Nakanoshima 2-chome Kita-ku, Osaka, JP)
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