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Patent Searching and Data


Title:
VIBRATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2012/026273
Kind Code:
A1
Abstract:
This vibration sensor is characterized by being provided with: a piezoelectric vibrating element equipped with a vibrating plate and a piezoelectric element affixed to at least one plane surface of the vibrating plate; and a signal processing substrate that performs a predetermined processing on a signal output from the piezoelectric vibrating element. The vibration sensor is further characterized by the piezoelectric vibrating element and the signal processing substrate being disposed aligned in a planar direction that is roughly perpendicular to the direction of vibration of the piezoelectric vibrating element.

Inventors:
KASAI, Shigeru (7-1Shiba 5-chome, Minato-k, Tokyo 01, 〒1088001, JP)
葛西 茂 (〒01 東京都港区芝五丁目7番1号日本電気株式会社内 Tokyo, 〒1088001, JP)
SHINODA, Shigeki (7-1Shiba 5-chome, Minato-k, Tokyo 01, 〒1088001, JP)
Application Number:
JP2011/067177
Publication Date:
March 01, 2012
Filing Date:
July 21, 2011
Export Citation:
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Assignee:
NEC CORPORATION (7-1Shiba 5-chome, Minato-ku Tokyo, 01, 〒1088001, JP)
日本電気株式会社 (〒01 東京都港区芝五丁目7番1号 Tokyo, 〒1088001, JP)
KASAI, Shigeru (7-1Shiba 5-chome, Minato-k, Tokyo 01, 〒1088001, JP)
葛西 茂 (〒01 東京都港区芝五丁目7番1号日本電気株式会社内 Tokyo, 〒1088001, JP)
International Classes:
G01H11/08; G01P15/09; H01L41/08; H01L41/187
Foreign References:
JPH1151964A
JP2000275127A
JP2001349900A
JPH09196682A
JPS60138431A
JPH01269400A
JPH07123496A
JP2005274322A
JP2006023250A
JP2007108187A
Other References:
See also references of EP 2610597A4
Attorney, Agent or Firm:
SHIMOSAKA, Naoki (7-1Shiba 5-chome, Minato-k, Tokyo 01, 〒1088001, JP)
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Claims: