Title:
VIBRATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/173527
Kind Code:
A1
Abstract:
Provided is a vibration sensor that comprises: a substrate having therein a space surrounded by a bottom surface, an upper surface, and a side surface; a first conductive member located on the bottom surface; a second conductive member located on the upper surface; a third conductive member located on the side surface; and a fourth conductive member located in the space and moved by vibration. The fourth conductive member electrically connects the first conductive member and the third conductive member or electrically connects the second conductive member and the third conductive member. The second conductive member has a convex shape inclined from the outer edges of the upper surface toward the center thereof and extending toward the bottom surface. As viewed from the bottom side, the convex shape is provided in a range overlapping with the center of the fourth conductive member.
Inventors:
NAKAMOTO SHINJI (JP)
SAKUMOTO DAISUKE (JP)
SAKUMOTO DAISUKE (JP)
Application Number:
PCT/JP2018/004215
Publication Date:
September 27, 2018
Filing Date:
February 07, 2018
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
G01H1/00
Foreign References:
| JP2015087220A | 2015-05-07 | |||
| JPH1164087A | 1999-03-05 | |||
| JPH07318411A | 1995-12-08 | |||
| JP2000173420A | 2000-06-23 |
Download PDF: