Title:
VIBRATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/158952
Kind Code:
A1
Abstract:
The purpose of the present invention is to obtain a vibration sensor suitable for improving vibration sensing precision. The vibration sensor according to one aspect of the present invention is characterized by having: a substrate having a first main surface and a second main surface disposed on a side opposite to the first main surface; a piezoelectric element disposed on the second main surface; and an electroconductive film disposed on the first main surface.
Inventors:
OSHITA JUNJI (JP)
MATSUDA ISAO (JP)
SHIBUYA TAKAO (JP)
MOTEGI SAKAE (JP)
HORIUCHI YUUKI (JP)
MATSUDA ISAO (JP)
SHIBUYA TAKAO (JP)
MOTEGI SAKAE (JP)
HORIUCHI YUUKI (JP)
Application Number:
PCT/JP2020/003828
Publication Date:
August 06, 2020
Filing Date:
January 31, 2020
Export Citation:
Assignee:
TAIYO YUDEN KK (JP)
International Classes:
G01H11/08; G01L1/16; H01L41/113
Foreign References:
| JPH0843430A | 1996-02-16 | |||
| JPH08129071A | 1996-05-21 | |||
| JP2018149094A | 2018-09-27 | |||
| JPH06201451A | 1994-07-19 | |||
| JP2019010240A | 2019-01-24 | |||
| US20130144176A1 | 2013-06-06 | |||
| KR20170128654A | 2017-11-23 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
Download PDF: