Title:
VIBRATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2022/000852
Kind Code:
A1
Abstract:
The present utility model provides a vibration sensor. The vibration sensor comprises: a circuit board having a resonant cavity, one side of the circuit board being provided with a through hole penetrating through the circuit board; a housing, the housing being fixed to the circuit board in a covering manner and covering the through hole, and the housing and the circuit board jointly defining an accommodating cavity; an MEMS microphone accommodated in the accommodating cavity and electrically connected to the circuit board, the MEMS microphone comprising a base fixed to the circuit board and having a back cavity, a first diaphragm supported at the end of the base away from the circuit board, and a back electrode board, wherein the base surrounds the through hole and enables the back cavity and the through hole to be communicated, and the first diaphragm is spaced from the back electrode board to form a capacitor structure; and a diaphragm assembly which is accommodated in the resonant cavity and partitions the resonant cavity into a first cavity and a second cavity, the first cavity and the back cavity being communicated by means of the through hole. When a vibration signal or a pressure signal is inputted from the side of the circuit board away from the resonant cavity, the diaphragm assembly vibrates and causes air pressure in the resonant cavity to change. Compared with the related art, the vibration sensor of the present utility model has higher sensitivity and better reliability.
Inventors:
ZENG PENG (CN)
WANG KAI (CN)
WANG KAI (CN)
Application Number:
PCT/CN2020/121263
Publication Date:
January 06, 2022
Filing Date:
October 15, 2020
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H04R19/04
Foreign References:
| CN111131988A | 2020-05-08 | |||
| CN108513241A | 2018-09-07 | |||
| CN209659621U | 2019-11-19 | |||
| CN209314103U | 2019-08-27 | |||
| US20170156002A1 | 2017-06-01 |
Attorney, Agent or Firm:
SHENZHEN JUNXINCHENG INTELLECTUAL PROPERTY FIRM (GENERAL PARTNERSHIP) (CN)
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