Title:
VIBRATION-TYPE ANGULAR VELOCITY DETECTOR
Document Type and Number:
WIPO Patent Application WO/2024/042819
Kind Code:
A1
Abstract:
A vibration-type angular velocity detector 100 comprises a vibrator 10 including: a substrate 1 having a first silicon layer 11 having a crystal plane with a Miller index of (111) and a second silicon layer 13 having a crystal plane with a Miller index of (100); and a vibration excitation portion 2 having a piezoelectric layer 21 provided on the opposite side of the second silicon layer 13 of the substrate 1 from the first silicon layer 11. The piezoelectric layer 2 is made of a piezoelectric element material grown on the opposite side of the second silicon layer 13 from the first silicon layer 11 and having at least a crystal plane with a Miller index of (100) or a Miller index (001).
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Inventors:
KIUCHI MARIO (JP)
Application Number:
PCT/JP2023/021578
Publication Date:
February 29, 2024
Filing Date:
June 09, 2023
Export Citation:
Assignee:
SUMITOMO PRECISION PROD CO (JP)
International Classes:
G01C19/5684; H10N30/063; H10N30/30; H10N30/853; H10N30/87
Foreign References:
| JP2014157095A | 2014-08-28 | |||
| JP2015099864A | 2015-05-28 | |||
| JP2002525843A | 2002-08-13 |
Attorney, Agent or Firm:
MIYAZONO, Hirokazu (JP)
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