Title:
VIBRATION-TYPE ANGULAR VELOCITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/094208
Kind Code:
A1
Abstract:
A vibration-type angular velocity sensor is provided with a substrate (10) and a vibrator. The vibrator has a supporting member (43), a linear drive beam (42), and a plurality of weight portions (31-36), which are connected by means of the drive beam (42), and the vibrator vibrates the weight portions (31-36) by means of warping of the drive beam (42), and is fixed, at a fixed point of the drive beam (42), to the substrate (10) with the supporting member (43) therebetween. Spring characteristics of the supporting member (43) are smaller than those of the drive beam (42).
Inventors:
JOMORI TOMOYA (JP)
MOCHIDA YOICHI (JP)
MOCHIDA YOICHI (JP)
Application Number:
PCT/JP2012/008158
Publication Date:
June 27, 2013
Filing Date:
December 20, 2012
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01C19/5747
Domestic Patent References:
| WO2009060531A1 | 2009-05-14 |
Foreign References:
| JP2003214856A | 2003-07-30 | |||
| JP2005106550A | 2005-04-21 | |||
| JP2004163376A | 2004-06-10 | |||
| JP2010276367A | 2010-12-09 |
Attorney, Agent or Firm:
KIN, Junhi (JP)
Gold Junki (JP)
Gold Junki (JP)
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Claims: