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Title:
VIBRATION TYPE ANGULAR VELOCITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/235719
Kind Code:
A1
Abstract:
A vibration type angular velocity sensor which detects an angular velocity is provided with: a base plate (10) having one surface; fixing portions (20); a plurality of weights (31 to 36); two linear driving beams (42) which are arranged in such a way as to sandwich the plurality of weights at one end side and another end side of the plurality of weights, and which are linked to one another by way of the plurality of weights; support members (43) which link the fixing portions and the driving beams; drive units (50) which drive the driving beams to vibrate; and a detecting unit (60) which, in response to the application of an angular velocity while the driving beams are being driven to vibrate, generates an electrical output corresponding to a displacement accompanying the application of the angular velocity. The plurality of weights consist of a pair of detecting weights (35, 36), a pair of inside driving weights (33, 34) each of which surrounds the periphery of one of the detecting weights and is linked to said detecting weight, and a pair of outside driving weights (31, 32) arranged on either side of the pair of inside driving weights. When viewed from a normal line direction to the one surface, the fixing portions are provided between the two driving beams and are arranged between the inside driving weights and between the inside driving weights and the outside driving weights.

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Inventors:
JOMORI TOMOYA (JP)
Application Number:
PCT/JP2018/022727
Publication Date:
December 27, 2018
Filing Date:
June 14, 2018
Export Citation:
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Assignee:
DENSO CORP (JP)
International Classes:
G01C19/5747; H01L41/113
Domestic Patent References:
WO2018003692A12018-01-04
WO2013172010A12013-11-21
Foreign References:
JP2013134064A2013-07-08
JP2005106550A2005-04-21
JP2004163376A2004-06-10
JP2009002834A2009-01-08
US20110132087A12011-06-09
Attorney, Agent or Firm:
YOU-I PATENT FIRM (JP)
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