Title:
VIBRATION TYPE GYROSCOPE
Document Type and Number:
WIPO Patent Application WO/2019/187624
Kind Code:
A1
Abstract:
One aspect of the present disclosure uses a resonator which is formed from a MEMS and which is provided with a drive-signal input terminal, a drive-signal output terminal, and a sense-signal output terminal. At the time of the startup, a lock-state determination unit stabilizes the amplitude of a drive signal to be equal to a reference voltage value, and outputs a lock signal when the amplitude is stabilized. A phase shifter generates an orthogonal signal which is obtained by shifting, by 90°, the phase of the drive signal outputted from the drive-signal output terminal, and a phase compensator outputs a phase signal having a phase corresponding to a control signal on the basis of the orthogonal signal and the in-phase signal of the drive signal. A multiplier multiplies a sense signal modulated by the drive signal outputted from the signal output terminal and the phase signal outputted from the phase compensator, and a control LPF performs filtering on the multiplication result obtained by the multiplier. A control unit inputs a zero-level signal to a PI controller during an initial state, and starts phase control by receiving an output signal of the control LPF upon output of the lock signal, and ends the control when the signal is stabilized around the zero level, and stores the control signal outputted from the PI controller.
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Inventors:
MATSUDAIRA NOBUAKI (JP)
FURUTA YOSHIKAZU (JP)
NEZUKA TOMOHIRO (JP)
FURUTA YOSHIKAZU (JP)
NEZUKA TOMOHIRO (JP)
Application Number:
PCT/JP2019/003655
Publication Date:
October 03, 2019
Filing Date:
February 01, 2019
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01C19/5776; B81B7/02; H01L29/84
Foreign References:
| JP2017156312A | 2017-09-07 | |||
| JP2017040566A | 2017-02-23 | |||
| JP2000131070A | 2000-05-12 | |||
| JP2006503303A | 2006-01-26 |
Attorney, Agent or Firm:
SATO INTERNATIONAL PATENT FIRM (JP)
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